NORTH BILLERICA, MA — (Marketwired) — 09/23/14 — has introduced a new featuring a high-capacity single filter element for processes that generate large particulates such as LPCVD, PECVD, and ALD.
The for processes that generate large particulates features one 13″ H x 14″ dia. filter made from a pleated high-temperature polyester. Providing a 40 sq. ft. surface area, this trap can retain 60 gms./sq. ft. of particulates which makes it ideally suited for protecting vacuum pumps in LPCVD, PECVD, and ALD processes.
Available with 25 micron and 100 micron ratings, this single filter for the MV Multi-Trap® High-Capacity Vacuum Inlet Trap fits a standard 16″ dia. all stainless steel housing with ISO 160 ports offered in straight-through and right angle configurations and provides conductance > 2000 CFM @ 1 TORR. A retrofit kit is available for MV Multi-Trap® 16″ Models currently in use.
The MV Multi-Trap® High-Capacity Vacuum Inlet Trap is priced from $5,295.00 (list) complete. Quotations are provided upon request.
About MV Products
Protecting vacuum pumps, people and the environment, MV Products is a division of . was founded in 1971 to serve customers in need of vacuum pump support and service. After years of field experience rebuilding vacuum pumps and analyzing the reasons why they failed, along with extensive research and development the MV Products division was created. MV Products manufactures a complete line of vacuum inlet traps, exhaust traps, , and for a wide range of manufacturing, laboratory, and commercial applications including universities and hospitals.
Mass-Vac, Inc. specializes in solving the process contamination problems associated vacuum systems that are used with processes such as MOCVD, HVPE, PECVD, or LPCVD which generate high volumes of particulates. These processes, of course, are used in manufacturing green products such as solar cells, HB-LEDs, and Li-Ion batteries. Mass-Vac, Inc. is an active member of SEMI and the American Vacuum Society.
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For more information contact:
MV Products, Division of Mass-Vac, Inc.
Herbert R. Gatti
Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393
FAX (978) 671-0014
e-mail: (tech contact)
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