Current topics such as low-damage etching in sensor technology, deep silicon etching, deposition of multilayer systems with ALD and first results of layers deposited with spatial PEALD at standard pressure will be in focus. In addition, SENTECH Instruments employees present new developments in fields of vacuum clusters and applications.
For further information please download the full program at our website.
After the seminar, all participants will be invited to visit SENTECH application laboratories and production facilities.
We are looking forward to welcome you at SENTECH headquarters in Berlin!
The SENTECH Seminar on „Plasma-Process-Technology” will take place at SENTECH Instruments, Schwarzschildstraße 2, Berlin-Adlershof, on Thursday, March 9, 2017. The registration fee is 238,00 including VAT.
Please send the Registration Form to SENTECH per fax no.: +49 89 8979607-22 or via email.
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